MEMS-based acousto-magnetic Partial Discharge detector based on on-chip planar inductors

Partial discharge (PD) may lead to the degradation of insulating materials and affect the lifetime of high voltage (HV) equipment. Thus, the detection of PD is an efficient and practical method to evaluate dielectric defects at an initial stage.

Given the importance of PD detection, this proposal will address the development of a new generation of MEMS-based low cost, electrodynamic (or inductive) microsensor to be used to accurately detect the presence of a PD in costly electrical conductors and MV/HV equipment.

The innovative idea in this proposed method lies in exploiting both electromagnetic radiation emissions, in the form of radiofrequency waves, as well as the acoustic emissions, in the form of ultrasonic waves, which mark discharge phenomena in high electric voltage cables, as an example.

Besides the high sensitivity guaranteed by the use of MEMS technology, this novel method will allow us to benefit from the advantages of both electrical and acoustic methods, and overcome their weaknesses.