Nanopure water for manufacturing of next generation of semiconductors

Purpose and goal: ** Denna text är maskinöversatt **

NSS Water´s´s aim was to build a larger test rig of its system for the production of nanopure water for the semiconductor industry.

This to be able to evaluate and test how such a system should be designed to achieve customer benefit. The benefit for intended customers is reduced water and chemical use as well as increased water quality.

The system needed to be used in a real clean room environment that reflects the manufacturing environment in the semiconductor industry, in order to perform as real tests as possible. Expected results and effects: ** Denna text är maskinöversatt ** The results of the project have been successful.

The expected outcome was that we would see the easiest way to integrate our system into a manufacturing process and if we need to make any changes and improvements. Thanks to the data we have collected in the project, we have been able to identify what we need to do to move on to the "next step". Together with our partners, we have achieved the objective we set.

Approach and implementation:

The arrangement has been such that we installed our equipment in a clean room, such an environment that exists in semiconductor manufacturing, this has taken place at Chalmers technical university college.

We have identified at what stage our equipment would be most useful and performed testing and data collection. for example, to see how our system can communicate with another system and how the control system should behave in different situations. Based on collected data, we have created different scenarios where we were able to adapt and tune the system for a specific application.